I. Main Application Scenarios of PVDF in Semiconductor Manufacturing

一、PVDF 於半導體製程之主要應用場景

The core semiconductor manufacturing processes are divided into four major segments: wet cleaning, high-purity fluid delivery, anti-corrosion structural equipment components, and anti-static transmission fittings. PVDF serves as the primary structural material for wet process equipment, applicable to most tooling and mechanical parts for wafer fabrication.

半導體核心製程主要分為四大區塊：濕式清洗、高純流體輸送、防腐設備結構件、防靜電傳動配件。PVDF 為濕製程設備之主力結構材料，適用於晶圓製造絕大多數治具與機械零配件。

1. Core Tooling for Wafer Wet Cleaning (Primary Application of PVDF Rods)

1. 晶圓濕式清洗核心治具（PVDF 棒材主力應用）

Wafer Cleaning Baskets / Wafer Carriers

晶圓清洗籃 / 晶圓承載座

Toothed rods, support shafts and fixing side plates are machined from PVDF rods to hold 6/8/12-inch silicon wafers. These baskets are fully submerged in chemicals such as hydrofluoric acid (HF), hydrogen peroxide, hot alkalis and mixed etching acids, ranking as the highest-consumption PVDF products on production lines.

齒條、支撐軸、固定側板皆由 PVDF 棒材精密加工而成，適用 6/8/12 吋矽晶圓承載。清洗籃可完全浸泡於氫氟酸 (HF)、雙氧水、高溫鹼液與混合蝕刻酸液中，為產線用量最大的 PVDF 製品。

The toothed PVDF rods precisely space out wafers to prevent surface scratches and wafer adhesion, compatible with automatic loading and unloading of batch wet benches and single-wafer cleaning equipment.

PVDF 齒條可精準控制晶圓間距，避免刮傷與貼片異常，適配批次式濕製程槽與單片清洗設備之自動進出料作業。

Supporting Basket Accessories

清洗籃配套零配件

PVDF support shafts, positioning pins, fasteners and separating racks are all precision turned from extruded PVDF rods.PVDF 

支撐軸、定位銷、固定件、分隔架，皆採擠出式 PVDF 棒材精車加工製成。

2. Anti-Corrosion Structural Components for Wet Benches

2. 濕製程工作台防腐結構件

Cleaning tank bodies, overflow weirs, flow deflectors, spray brackets and chemical distribution manifolds, fabricated via welding PVDF sheets and rods;

清洗槽本體、溢流堰、導流板、噴霧支架、藥液分流歧管，皆以 PVDF 板材與棒材熱焊組立而成；

Anti-corrosion pump and valve assemblies: PVDF valve stems, valve plugs, pump sleeves, bearings and gears for transporting high-purity etching and cleaning chemicals;

防腐泵閥組件：PVDF 閥桿、閥塞、泵護套、軸承、齒輪，適用高純蝕刻與清洗藥液輸送；

Housings and internal liners of corrosion-resistant level gauges and flow meters, featuring zero leakage and zero medium contamination under long-term exposure to highly corrosive acid and alkali solutions.

防腐液位計、流量計外殼與內襯，長期接觸強腐蝕酸鹼液可達零滲漏、零介質汙染。

3. Anti-Static & Wear-Resistant Precision Transmission Parts (Conductive Modified PVDF Rods)

3. 防靜電耐磨精密傳動零件（導電改質 PVDF 棒）

To avoid electrostatic breakdown of wafers, carbon black or carbon fiber filled conductive PVDF rods are processed into anti-static bearings, corrosion-resistant gears, rollers and conveyor guide rails:

為防止晶圓靜電擊穿，透過碳黑、碳纖維填充之導電 PVDF 棒，可加工為防靜電軸承、防腐齒輪、滾輪與傳動導軌：Transmission gears and transport rollers for cleaning machines with self-lubricating, maintenance-free performance;

清洗機傳動齒輪與輸送滾輪，具自潤滑、免保養特性；

Anti-static positioning tooling that dissipates static buildup and protects delicate circuitry on wafer chips.

防靜電定位治具，可釋放累積靜電，保護晶圓晶片精密電路結構

II. Six Core Advantages of PVDF for Harsh Semiconductor Working Conditions

二、PVDF 對應半導體嚴苛工況之六大核心優勢

1. Extreme Chemical Resistance, Compatible with All Types of Semiconductor Chemicals

1. 超強耐化性，相容全系列半導體藥液

PVDF features a stable carbon-fluorine molecular structure, enabling long-term resistance to all highly corrosive media used in semiconductor manufacturing: 49% hydrofluoric acid (HF), concentrated sulfuric acid, concentrated phosphoric acid, hydrogen peroxide, photoresist strippers and various organic etching solvents. It remains free of swelling, cracking or decomposition after immersion within a wide temperature range of -40℃ to 125℃.PVDF 

擁有穩定的碳氟分子結構，可長期耐受半導體製程所有高腐蝕介質：49% 氫氟酸、濃硫酸、濃磷酸、雙氧水、光阻剝除液與各式有機蝕刻溶劑。在 -40℃～125℃ 寬溫浸泡環境下，不會膨脹、龜裂或分解。

Compared with PP, nylon and POM: conventional plastics swell and deform rapidly upon contact with hydrofluoric acid, while metal fittings corrode and rust directly. Only PVDF delivers long-term stable performance for all chemical environments in wet cleaning processes.

相較 PP、尼龍、POM 等通用塑膠，接觸氫氟酸會快速膨脹變形，金屬配件則直接腐蝕生鏽；唯有 PVDF 可在濕式清洗全藥液環境下長期穩定使用。

2. Excellent Mechanical Toughness & Dimensional Stability for High-Frequency Automated Cycles

2. 機械韌性佳、尺寸穩定，適配高頻自動化循環

PVDF boasts high strength and superior toughness. The toothed support bars of wafer baskets machined from PVDF rods will not become brittle or fracture under repeated lifting and alternating hot-cold chemical exposure. They can support ultra-thin silicon wafers as thin as 120 μm and lower wafer breakage loss.

PVDF 強度與韌性優異，PVDF 棒加工之晶圓籓齒條支撐結構，在反覆升降、冷熱藥液交替環境下不易脆裂，可穩定支撐 120μm 超薄矽晶圓，降低破片損耗。

With a low coefficient of thermal expansion, PVDF maintains fixed dimensions under hot chemicals and thermal cycling. The slot clearance of wafer baskets stays consistent to prevent wafer jamming and edge scratching.

PVDF 熱膨脹係數低，高溫藥液與溫度循環下尺寸固定，晶圓籓槽距穩定，避免卡片、邊緣刮傷問題。

Its wear-resistant and self-lubricating property ensures PVDF gears and bearings operate without shedding debris. No lubricating oil is required for long-term service, eliminating oil contamination risks in cleanrooms.

材質具耐磨、自潤滑特性，PVDF 齒輪、軸承運轉無碎屑掉落、無須潤滑油，徹底杜絕無塵室油汙染風險。

3. Inherent UL94 V-0 Highest Flame Retardant Rating for Cleanroom Compliance

3. 原生 UL94 V-0 最高阻燃等級，符合無塵室規範

Semiconductor cleanrooms enforce strict fire safety standards. Without additional flame retardant additives, PVDF achieves UL94 V-0 vertical flammability rating: it self-extinguishes rapidly once the flame source is removed and produces no flaming molten drips that could ignite nearby wafers or flammable chemicals.

半導體無塵室防火規範嚴格，PVDF 無須添加阻燃劑即具原生 UL94 V-0 垂直阻燃等級，離火即熄、無熔融滴落引燃，不會點燃晶圓與易燃藥液。

Ordinary plastics rated V-2 melt and drip with open flames under high temperatures, posing severe fire hazards to production lines. All semiconductor fabs mandate V-0 fluoropolymer components for production equipment.

一般 V-2 等級塑膠高溫會熔融滴落、持續燃燒，對產線構成重大火險；半導體廠均強制設備使用 V-0 等級氟塑零組件。

4. Complete Anti-Static Modification Solutions to Prevent Electrostatic Breakdown

4. 完整防靜電改質方案，杜絕靜電擊穿

Custom carbon black or carbon fiber filled conductive/anti-static PVDF rods are available with controllable surface resistance ranging from 10⁶ to 10¹⁰ Ω・cm. This effectively addresses the pain point of electrostatic discharge generated by fluid friction during cleaning, which would otherwise break down chip circuits. Such modified materials are widely applied to wafer transport rollers, transmission gears and tooling fixtures.

可客製碳黑 / 碳纖維導電防靜電 PVDF 棒，表面電阻可控落在 10⁶～10¹⁰ Ω・cm 區間，有效消除清洗流體摩擦產生的靜電放電，避免晶片電路擊穿，廣泛應用於晶圓輸送滾輪、傳動齒輪與定位治具。

5. Superior Precision Machinability for Custom Non-Standard Components of All Sizes

5. 精密加工性優異，可客製全尺寸非標零組件

PVDF rods exhibit excellent performance in turning, milling, drilling and welding. Custom toothed basket shafts, valve parts and instrument fittings of any specification can be fabricated according to wafer sizes (4/6/8/12-inch) and equipment drawings.

PVDF 棒材車削、銑削、鑽孔、熱焊性能極佳，可依 4/6/8/12 吋晶圓規格與設備圖紙，客製各種規格晶圓籓齒軸、閥件、儀器配件。

Its dense, smooth surface resists residual chemicals and particle adhesion, and dries quickly after rinsing to reduce cross-contamination risks.

材質結構緻密、表面光滑，不易殘留藥液、吸附微粒，水洗後快速乾燥，大幅降低交叉汙染風險。

III. Competitive Advantages as a Source Manufacturer

三、源頭廠商競爭優勢

1. Controllable Raw Material Quality with Exclusive Production Line for Semiconductor-Grade High-Purity PVDF

1. 原料品質可控，具半導體高純 PVDF 專屬產線

All PVDF sheets and rods are manufactured from virgin brand-new PVDF raw materials with zero recycled regrind. Ion leaching test reports are available for every production batch.

全系列 PVDF 板材、棒材皆採全新原生料生產，不摻回收回投料，每批次皆可提供離子析出檢測報告，確保半導體高純製程規格。

2. Full Range of Sizes with Ample Stock of Standard & Conductive Modified PVDF Rods

2. 規格齊全、標準 / 導電改質 PVDF 棒庫存充足

Standard PVDF rods ranging from Φ10 mm to Φ300 mm are kept in ready stock. Custom anti-static conductive PVDF rods and carbon-fiber reinforced wear-resistant PVDF rods are also available for machining all semiconductor parts including basket toothed shafts, pumps & valve components, gears and level gauge accessories. Fast lead time is guaranteed for rush orders.

常規 Φ10mm～Φ300mm PVDF 棒常備現貨，可客製防靜電導電 PVDF、碳纖維耐磨 PVDF，加工生產晶圓籓齒軸、泵閥零件、齒輪、液位計配件等半導體零件，急單可快速交貨。

3. One-Stop Supporting Precision Deep Processing Service

3. 一站式精密深加工配套服務

We provide precision cutting, gear turning, drilling and threading of PVDF rods based on customer drawings or samples. Finished products such as basket support shafts, valve stems, bearings and gears can be delivered directly, eliminating secondary processing costs for equipment manufacturers and machining factories with bulk purchasing demands.

依客戶圖紙 / 樣品提供精密裁切、齒型車削、鑽孔、攻牙深加工，出貨即為晶圓籓支撐軸、閥桿、軸承、齒輪等成品，省去設備廠、加工廠二次加工成本。

4. Special Low-Internal-Stress Extrusion Process Ensuring Zero Distortion of Finished Parts

4. 低內應力擠出工藝，確保成品零變形

PVDF rods are extruded via a low-speed constant-temperature process to minimize internal residual stress. Machined components will not warp or crack even after long-term immersion in high-temperature acid and alkali liquids, greatly extending the service life of wafer baskets and anti-corrosion spare parts and reducing customers’ replacement frequency.

採用低速恆溫擠出工藝，大幅降低材料殘留內應力。加工零件長期浸泡高溫酸鹼液不翹曲、不龜裂，有效延長晶圓籓與防腐配件使用壽命、降低客戶換件頻率。

5. Professional Application Technical Support & Custom Material Selection Solutions

5. 專業工況技術支援與客製選材方案

With years of experience in fluoropolymer applications for the semiconductor industry, we recommend virgin PVDF or conductive modified PVDF grades tailored to customers’ chemical media, operating temperatures and anti-static requirements. Professional material selection schemes are offered for different processes including wet cleaning, fluid delivery and anti-static transmission, with full-cycle technical support covering pre-sales consultation and after-sales service.

深耕半導體氟塑應用領域，可依客戶藥液介質、工作溫度、防靜電需求，匹配純 PVDF 或導電改質 PVDF 材質。針對濕式清洗、流體輸送、防靜電傳動等製程提供專業選材方案，並提供售前到售後全週期技術支援。